Carrying container for holding jig

保持治具の搬送容器

Abstract

【課題】収納効率に優れ、しかも、搬送時の振動等でウェーハの周縁部等が損傷するおそれを排除することのできる保持治具の搬送容器を提供する。 【解決手段】テストウェーハW用の保持治具1を支持する容器本体10の表面に蓋体20を着脱自在に嵌合する保持治具1の搬送容器であって、容器本体10を、断面略溝形の本体部11と、本体部11に凹み形成されて周壁上端部に保持治具1の周縁部を支持する中空の錐台部13と、本体部11と錐台部13の周壁端部との間に形成されて保持治具1の周縁部を規制する複数のストッパ部18とから形成する。また、蓋体20を、容器本体10の本体部11表面に重なる断面略溝形の本体蓋部21と、この本体蓋部21に凹み形成されて容器本体10の錐台部13とストッパ部18とを覆う中空の錐台ドーム部23とから形成する。 【選択図】図2
<P>PROBLEM TO BE SOLVED: To provide a carrying container for a holding jig, which is excellent in housing efficiency and can eliminate the risk that the circumferential edge or the like of a wafer is damaged due to vibration in carrying. <P>SOLUTION: The carrying container for removably fitting a holding jig 1 for fitting a lid 20 onto the surface of a container body 10 for supporting the holding jig 1 for a test wafer W, wherein the container body 10 includes a body 11 having a substantially groove-like cross section, a hollow circular truncated cone 13 formed like a recess on the body 11 and supporting the circumferential edge of the holding jig 1 on the upper end of a circumferential wall, and a plurality of stoppers 18 formed between the body 11 and the circumferential wall end of the circular truncated cone 13 and regulating the circumferential edge of the holding jig 1. The lid 20 includes: a body lid 21 overlapping on the surface of the body 11 of the container body 10 and having a substantially groove-like cross section; and a hollow circular truncated cone dome 23 formed like a recess on the body lid 21 and covering the circular truncated cone 13 of the container body 10 and the stoppers 18. <P>COPYRIGHT: (C)2010,JPO&INPIT

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Cited By (2)

    Publication numberPublication dateAssigneeTitle
    US-9761470-B2September 12, 2017Toyota Jidosha Kabushiki KaishaWafer carrier